Design of a 2-DOF scanning mirror using flexible membrane and electromagnetic actuators
Author:
Funder
Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education
Publisher
Springer Science and Business Media LLC
Link
https://link.springer.com/content/pdf/10.1007/s00542-024-05693-0.pdf
Reference33 articles.
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3. Chen S, Zhang Y, Hong X, Li J (2022) Technologies and applications of silicon-based micro-optical electromechanical systems: a brief review. J Semicond 43(8):081301
4. Cheng H-C, Liu S-C, Hsu C-C, Lin H-Y, Shih F, Wu M, Liang K-C, Lai M-F, Fang W (2023) On the design of piezoelectric MEMS scanning mirror for large reflection area and wide scan angle. Sens Actuators A Phys 349:114010
5. Conant RA, Hagelin PM, Krishnamoorthy U, Hart M, Solgaard O, Lau KY, Muller RS (2000) A raster-scanning full-motion video display using polysilicon micromachined mirrors. Sens Actuators A Phys 83(1–3):291–296
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