Nonlinear Dynamics of Large-Angle Circular Scanning With an Aluminum Nitride Micro-Mirror
Author:
Affiliation:
1. Department of Mechanical Engineering, University of Michigan, Ann Arbor, MI, USA
2. MEMS Group, VTT Technical Research Centre of Finland Ltd, Espoo, Finland
Funder
VTT Research Centre of Finland, Fulbright Finland Foundation;
Electronic Components and Systems for European Leadership (ECSEL) Joint Undertaking
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Link
http://xplorestaging.ieee.org/ielx7/84/10142033/10064333.pdf?arnumber=10064333
Reference23 articles.
1. Linear Modeling and Control of Comb-Actuated Resonant MEMS Mirror With Nonlinear Dynamics
2. Nonlinear Dynamic Behavior of a Bi-Axial Torsional MEMS Mirror with Sidewall Electrodes
3. Averaging Methods in Nonlinear Dynamical Systems
4. Full-order frequency-domain simulations of nonlinear piezoelectric MEMS;opreni;Advances in Nonlinear Dynamics,2021
5. Analysis of the Nonlinear Response of Piezo-Micromirrors with the Harmonic Balance Method
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