Author:
Moeenfard Hamid,Ahmadian Mohammad Taghi
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference19 articles.
1. M. I. Younis, 2004, Modeling and Simulation of Microelectromechanical Systems in Multi-Physics Fields, Dissertation submitted to the Faculty of the Virginia Polytechnic Institute and State University in partial fulfillment of the requirements for the degree of Doctor of Philosophy in Engineering Mechanics.
2. A novel method to predict the pull-in voltage in a closed form for micro-plates actuated by a distributed electrostatic force;Chao;J. Micromech. Microeng.,2006
3. 128×128 deformable mirror devices;Hornbeck;IEEE Trans. Electron Dev. ED-30,1983
4. Surface-micromachined micro-optical elements and systems;Muller;Proc. IEEE,1998
5. Implementation and characterization of a flexure-beam micromechanical spatial light modulator;Lin;Opt. Eng.,1994
Cited by
21 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献