Nonlinear dynamic analysis of electrostatically actuated dual-axis micromirrors
Author:
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,General Engineering,Aerospace Engineering,Automotive Engineering,Industrial and Manufacturing Engineering,Applied Mathematics
Link
https://link.springer.com/content/pdf/10.1007/s40430-022-03948-3.pdf
Reference55 articles.
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3. Kainz A, Hortschitz W, Steiner H, Schalko J, Jachimowicz A, Keplinger F (2017) Accurate analytical model for air damping in lateral MEMS/MOEMS oscillators. Sens Actuators, A Phys 255:154–159. https://doi.org/10.1016/j.sna.2016.12.023
4. Bouchaala A (2018) Theoretical study of an electrostatically actuated torsional microsensor for biological applications. Microsyst Technol 24(2):1109–1114. https://doi.org/10.1007/S00542-017-3467-9
5. Kumar D, Singh NK, Bajpai V (2020) Recent trends, opportunities and other aspects of micro-EDM for advanced manufacturing: a comprehensive review. J Braz Soc Mech Sci Eng 42(5):1–26. https://doi.org/10.1007/S40430-020-02296-4
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