Electromagnetic biaxial microscanner with mechanical amplification at resonance-Reference-Cited by-同舟云学术

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Electromagnetic biaxial microscanner with mechanical amplification at resonance

Published:2015-06-17 Issue:13 Volume:23 Page:16792
ISSN:1094-4087
Container-title:Optics Express
language:en
Short-container-title:Opt. Express

Author:

Cho Ah Ran,Han Aleum,Ju Suna,Jeong Haesoo,Park Jae-Hyoung,Kim Inhoi,Bu Jong-Uk,Ji Chang-Hyeon

Funder

Ministry of Education (Ministry of Education of the Republic of Korea)

Ministry of Science, ICT and Future Planning (MSIP)

Ministry of Trade, Industry and Energy (Ministry of Trade, Industry and Energy, Korea)

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics

Reference12 articles.

1. MEMS scanned laser head-up display

2. Large aperture MEMS scanner module for 3D distance measurement

3. Self-aligned vertical electrostatic combdrives for micromirror actuation

4. Theory and Experiments of Angular Vertical Comb-Drive Actuators for Scanning Micromirrors

5. Eye-type scanning mirror with dual vertical combs for laser display

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