Author:
Chang Cheng-Kuang,Lin Tee,Hu Shih-Cheng,Fu Ben-Ran,Hsu Jung-Sheng
Funder
Ministry of Science and Technology of Taiwan
Subject
Management, Monitoring, Policy and Law,Renewable Energy, Sustainability and the Environment,Geography, Planning and Development
Reference20 articles.
1. Humidification of Large-Scale Cleanrooms by Adiabatic Humidification Method in Subtropical Areas: An Industrial Case Study;Chen;ASHRAE Trans.,2009
2. Capturing energy-saving opportunities in make-up air systems for cleanrooms of high-technology fabrication plant in subtropical climate
3. Power consumption of semiconductor fabs in Taiwan
4. Worldwide Fab Energy Survey Report,1999
5. Summary Facilities Energy Consumption in 200 mm and 300 mm Fabs,2008
Cited by
21 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献