Power consumption of semiconductor fabs in Taiwan-Reference-Cited by-同舟云学术

Power consumption of semiconductor fabs in Taiwan

Published:2003-06 Issue:8 Volume:28 Page:895-907
ISSN:0360-5442
Container-title:Energy
language:en
Short-container-title:Energy

Author:

Hu S.-C.,Chuah Y.K.

Publisher

Elsevier BV

Subject

General Energy,Pollution,Mechanical Engineering,Building and Construction,Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Civil and Structural Engineering

Reference7 articles.

1. Energy use in the semiconductor manufacturing industry. Washington DC: United States Environmental Protection Agency, 1998.

2. Energy efficiency in semiconductor manufacturing: a tool for cost savings and pollution prevention;Williamson;Semiconductor Fabtech Journal,1999

3. Energy consumption survey report, 1991, Shinjuku-ku Tokyo: Japan Mechanical Association. 1990 (in Japanese).

4. International energy project status;Pei,1997

5. Semiconductor Industry Association. Roadmap for the semiconductor manufacturing industry, San Jose, California,1998;p.155–6.

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