Ultra-thin SiO2 on Si VIII. Accuracy of method, linearity and attenuation lengths for XPS
Author:
Publisher
Wiley
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference32 articles.
1. Critical review of the current status of thickness measurements for ultrathin SiO2 on Si Part V: Results of a CCQM pilot study
2. Ultrathin SiO2 on Si. VI. Evaluation of uncertainties in thickness measurement using XPS
3. Ultrathin SiO2 on Si. VII. Angular accuracy in XPS and an accurate attenuation length
4. The Thickogram: a method for easy film thickness measurement in XPS
5. Ultrathin SiO2 on Si II. Issues in quantification of the oxide thickness
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