Optimized material solutions for advanced DRAM peripheral transistors-Reference-Cited by-同舟云学术

Optimized material solutions for advanced DRAM peripheral transistors

Published:2016-02 Issue:2 Volume:213 Page:245-254
ISSN:1862-6300
Container-title:physica status solidi (a)
language:en
Short-container-title:Phys. Status Solidi A

Author:

Spessot Alessio¹,Ritzenthaler Romain²,Schram Tom²,Horiguchi Naoto²,Fazan Pierre¹

Affiliation:

1. Micron Technology Belgium; Kapeldreef 75 3001 Leuven Belgium

2. Imec; Kapeldreef 75 3001 Leuven Belgium

Publisher

Wiley

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1002/pssa.201532791/fullpdf

Reference37 articles.

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4. S.-Y. Cha 2011

5. C. Ni X. Fu N. Yoshida O. Chan M. Jin H. Chen S. Hung R. Jakkaraju S. Kesapragada C. Lazik R. Hung S. Gandikota C. Chang A. Brand 2012

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