Particle-in-Cell/Test-Particle Simulations of Technological Plasmas: Sputtering Transport in Capacitive Radio Frequency Discharges-Reference-Cited by-同舟云学术

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Particle-in-Cell/Test-Particle Simulations of Technological Plasmas: Sputtering Transport in Capacitive Radio Frequency Discharges

Published:2016-09-29 Issue:1-2 Volume:14 Page:1600140
ISSN:1612-8850
Container-title:Plasma Processes and Polymers
language:en
Short-container-title:Plasma Process. Polym.

Author:

Trieschmann Jan¹,Schmidt Frederik¹,Mussenbrock Thomas¹

Affiliation:

1. Department of Electrical Engineering and Information Science; Ruhr University Bochum; Bochum 44780 Germany

Funder

German Research Foundation

Publisher

Wiley

Subject

Polymers and Plastics,Condensed Matter Physics

Reference78 articles.

1. Principles of Plasma Discharges and Materials Processing

2. Physics of Radio-Frequency Plasmas

3. Continuum and kinetic simulations of the neutral gas flow in an industrial physical vapor deposition reactor

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Surface processes in low-pressure capacitive radio frequency discharges driven by tailored voltage waveforms;Plasma Sources Science and Technology;2020-07-13

2. Electron dynamics in low pressure capacitively coupled radio frequency discharges;Journal of Applied Physics;2020-05-14

3. A generic method for equipping arbitrary rf discharge simulation frameworks with external lumped element circuits;Journal of Applied Physics;2019-05-07

4. Improved homogeneity of plasma and coating properties using a lance matrix gas distribution in MW-PECVD;Journal of Coatings Technology and Research;2018-10-05

5. Magnetical asymmetric effect in geometrically and electrically symmetric capacitively coupled plasma;Plasma Processes and Polymers;2017-06-27

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