A generic method for equipping arbitrary rf discharge simulation frameworks with external lumped element circuits
Author:
Affiliation:
1. Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Bochum 44780, Germany
2. Electrodynamics and Physical Electronics Group, Brandenburg University of Technology Cottbus-Senftenberg, Cottbus 03046, Germany
Funder
Deutsche Forschungsgemeinschaft
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5091965
Reference17 articles.
1. Principles of Plasma Discharges and Materials Processing
2. Physics of Radio-Frequency Plasmas
3. Nonlinear plasma dynamics in capacitive radio frequency discharges
4. Enhancement of Ohmic and Stochastic Heating by Resonance Effects in Capacitive Radio Frequency Discharges: A Theoretical Approach
5. Self-excitation of the plasma series resonance in radio-frequency discharges: An analytical description
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