Electron dynamics in low pressure capacitively coupled radio frequency discharges-Reference-Cited by-同舟云学术

Electron dynamics in low pressure capacitively coupled radio frequency discharges

Published:2020-05-14 Issue:18 Volume:127 Page:181101
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Wilczek S.¹^ORCID,Schulze J.¹²^ORCID,Brinkmann R. P.¹^ORCID,Donkó Z.³^ORCID,Trieschmann J.⁴^ORCID,Mussenbrock T.⁴^ORCID

Affiliation:

1. Department of Electrical Engineering and Information Science, Ruhr University Bochum, D-44780 Bochum, Germany

2. School of Physics, Dalian University of Technology, 116024 Dalian, China

3. Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Konkoly-Thege Miklós str. 29-33, H-1121 Budapest, Hungary

4. Electrodynamics and Physical Electronics Group, Brandenburg University of Technology Cottbus-Senftenberg, Siemens-Halske-Ring 14, D-03046 Cottbus, Germany

Funder

Deutsche Forschungsgemeinschaft

National Office for Research, Development, and Innovation of Hungary

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/5.0003114

Reference186 articles.

1. Principles of Plasma Discharges and Materials Processing

2. Physics of Radio-Frequency Plasmas

3. Radio-Frequency Capacitive Discharges

4. Plasma Electronics

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