The effect of surface topography evolution on sputter profiling depth resolution in Si-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

The effect of surface topography evolution on sputter profiling depth resolution in Si

Published:1985-02 Issue:1 Volume:7 Page:35-40
ISSN:0142-2421
Container-title:Surface and Interface Analysis
language:en
Short-container-title:Surf. Interface Anal.

Author:

Carter G.,Nobes M. J.,Lewis G. W.,Brown C. R.

Publisher

Wiley

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference21 articles.

1. Theoretical assessments of major physical processes involved in the depth resolution in sputter profiling

2. Influence of ion bombardment on depth resolution in Auger electron spectroscopy analysis of thin gold films on nickel

3. A Nomographic method for identification of interface position on ion-etch profiles

4. Depth resolution in composition profiles by ion sputtering and surface analysis for single-layer and multilayer structures on real substrates

5. Optimized depth resolution in ion-sputtered and lapped compositional profiles with Auger electron spectroscopy

Cited by 15 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Evolution of Topography Under Low-Energy Ion Bombardment;Low-Energy Ion Irradiation of Materials;2022

2. Topography evolution mechanism on fused silica during low-energy ion beam sputtering;Journal of Applied Physics;2011-02-15

3. The effects of surface ripples on sputtering erosion rates and secondary ion emission yields;Journal of Applied Physics;1999-01

4. The effects of ion bombardment sputtering and atomic transport related roughening and smoothing on depth profiling resolution;Vacuum;1996-05

5. Characterization of sharp interfaces and delta doped layers in semiconductors using secondary ion mass spectrometry;Analytica Chimica Acta;1994-10

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3