The effects of surface ripples on sputtering erosion rates and secondary ion emission yields
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.369408
Reference29 articles.
1. The mechanisms of etch pit and ripple structure formation on ion bombarded Si and other amorphous solids
2. Surface roughness development during sputtering of GaAs and InP: Evidence for the role of surface diffusion in ripple formation and sputter cone development
3. Roughening instability and evolution of the Ge(001) surface during ion sputtering
4. Topography development on selected inert gas and self-ion bombarded Si
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