Optimized depth resolution in ion-sputtered and lapped compositional profiles with Auger electron spectroscopy
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference37 articles.
1. The growth of topography during sputtering of amorphous solids
2. Ion beam texturing of surfaces
3. The development of surface topography during depth profiling in auger electron spectroscopy
4. The structure and topographical modification of surfaces during depth profiling
5. Secondary−ion mass spectrometry and its use in depth profiling
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1. Bibliography;An Introduction to Surface Analysis by XPS and AES;2019-08-30
2. Quantitative Compositional Depth Profiling;Springer Series in Surface Sciences;2012-06-01
3. Considerable Improvement of Depth Resolution in Auger Sputter Depth Profiling of Polycrystalline Thin Films Using In-situ Sample Preparation Methods;ECS Transactions;2009-09-25
4. In situ low-angle cross sectioning: Bevel slope flattening due to self-alignment effects;Applied Surface Science;2009-08
5. Improved sputter depth resolution in Auger composition-depth profiling of polycrystalline thin film systems using single grain depth profiling;Surface and Interface Analysis;2006
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