Depth resolution in composition profiles by ion sputtering and surface analysis for single-layer and multilayer structures on real substrates
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference29 articles.
1. Quantitative depth profiling in surface analysis: A review
2. Quantitative electron spectroscopy of surfaces: A standard data base for electron inelastic mean free paths in solids
3. Computer simulation of atomic mixing during ion bombardment
4. The depth resolution of sputter profiling
5. A theoretical treatment of cascade mixing in depth profiling by sputtering
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