Effect of Pressure on Microstructure of <111>-Oriented β-SiC Films: Research via Electron Backscatter Diffraction

Author:

Zhang Song1,Xu Qingfang1,Sun Qingyun1,Zhu Peipei1,Tu Rong1,Hu Zhiying1,Han Mingxu2,Goto Takashi2,Zhang Lianmeng1,Yan Jiasheng3,Li Shusen3

Affiliation:

1. State Key Laboratory of Advanced Technology for Materials Synthesis and Processing; Wuhan University of Technology; 122 Luoshi Road Wuhan 430070 China

2. Institute for Materials Research; Tohoku University; 2-1-1 Katahira, Aoba-ku Sendai 980-8577 Japan

3. Tech Semiconductors, LTD.; No.162 Shengli Street Xiangfan 441021 China

Funder

National Natural Science Foundation of China

111 Project

International Science & Technology Cooperation Program of China

Natural Science Foundation of Hubei Province, China

Publisher

Wiley

Subject

Materials Chemistry,Ceramics and Composites

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