Five-degrees-of-freedom measurement system based on a monolithic prism and phase-sensitive detection technique-Reference-Cited by-同舟云学术

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Five-degrees-of-freedom measurement system based on a monolithic prism and phase-sensitive detection technique

Published:2013-09-09 Issue:26 Volume:52 Page:6607
ISSN:1559-128X
Container-title:Applied Optics
language:en
Short-container-title:Appl. Opt.

Author:

Huang Pei,Li Yan,Wei Haoyun,Ren Libing,Zhao Shijie

Funder

National Science and Technology Major Project of China

Tsinghua University Initiative Scientific Research Program

State Key Lab of Precision Measurement Technology & Instruments of Tsinghua University

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering

Reference17 articles.

1. Geometric error measurement and compensation of machines—An update

2. Error compensation in machine tools — a review

3. CNC Machine Accuracy Enhancement Through Real-Time Error Compensation

4. On-line error compensation of coordinate measuring machines

5. A Multi-Degree-of-Freedom Measuring System for CMM Geometric Errors

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2. Measurement of six-degree-of-freedom geometric errors of a translation stage using three absolute position encoders;Measurement Science and Technology;2024-02-08

3. Geometric error measuring, modeling, and compensation for CNC machine tools: A review;Chinese Journal of Aeronautics;2024-02

4. Development of a 3-DOF Angle Sensor Based on a Single Laser Interference Probe;Micromachines;2023-12-10

5. Six-degree-of-freedom geometrical errors measurement system with compensation of laser beam drifts and installation errors for linear stage;Optics and Lasers in Engineering;2023-03

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