Portable 5-DOF measurement system using a parallel beam generation method for linear axis detection

Abstract

Geometric error detection is crucial for evaluating the accuracy of the linear axis. However, the practicality of traditional dual-beam detection systems is limited by the parallelism of beams. This study proposes a portable 5-DOF measurement system using a novel parallel beam generation method. Two orthogonal corner cube retroreflectors (CCRs) and a beam splitter (BS) are utilized to achieve two measuring beams with excellent parallelism, which is determined solely by the CCR. The theoretical parallelism of beams is analyzed and experimentally verified. Two position sensitive detectors (PSDs) and one autocollimator are used to measure two straightness errors and three angular errors, and the detection deviations are modelled and compensated. The experiment proves that dual beam that are generated on the basis of the above structure could achieve a parallelism of 5.9′′ without careful adjustment. The designed 5-DOF measurement system has a straightness measurement range of ± 400 µm and an angle measurement range of ± 300′′. The repeatability of the system is 2.20 µm for straightness errors, 1.58′′ for yaw error, 1.82′′ for pitch error and 5.04′′ for roll error detection. The designed 5-DOF measurement system has the advantages of a simple structure and stable accuracy and is very practical in measuring the geometric errors of machine tools.