Characteristics of extreme ultraviolet emission from mid-infrared laser-produced rare-earth Gd plasmas-Reference-Cited by-同舟云学术

Characteristics of extreme ultraviolet emission from mid-infrared laser-produced rare-earth Gd plasmas

Published:2013-12-16 Issue:26 Volume:21 Page:31837
ISSN:1094-4087
Container-title:Optics Express
language:en
Short-container-title:Opt. Express

Author:

Higashiguchi Takeshi,Li Bowen,Suzuki Yuhei,Kawasaki Masato,Ohashi Hayato,Torii Shuichi,Nakamura Daisuke,Takahashi Akihiko,Okada Tatsuo,Jiang Weihua,Miura Taisuke,Endo Akira,Dunne Padraig,O’Sullivan Gerry,Makimura Tetsuya

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics

Reference18 articles.

1. 13.5 nm EUV generation from tin-doped droplets using a fiber laser

2. From performance validation to volume introduction of ASML's NXE platform

3. Physical processes in EUV sources for microlithography

4. Evaluation of resist sensitivity in extreme ultraviolet/soft x-ray region for next-generation lithography

5. Ground-state configurations of ionic species I through XVI forZ=57−74and the interpretation of4d−4femission resonances in laser-produced plasmas

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