Spectral control of beyond extreme ultraviolet emission from a dual-laser-produced plasma-Reference-Cited by-同舟云学术

Spectral control of beyond extreme ultraviolet emission from a dual-laser-produced plasma

Published:2024-01-29 Issue:5 Volume:124 Page:
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:

Author:

Kume Masaki¹,Sugiura Tsukasa¹,Morita Hiroki¹^ORCID,Jiang Weihua²^ORCID,Sakaue Kazuyuki³,Namba Shinichi⁴^ORCID,O'Sullivan Gerry⁵^ORCID,Higashiguchi Takeshi¹^ORCID

Affiliation:

1. Department of Electrical and Electronic Engineering, Faculty of Engineering, Utsunomiya University 1 , 7-1-2 Yoto, Utsunomiya, Tochigi 321-8585, Japan

2. Department of Electrical Engineering, Nagaoka University of Technology 2 , Nagaoka, Niigata 940-2188, Japan

3. Nuclear Professional School, School of Engineering, The University of Tokyo 3 , 7-3-1 Hongo, Bunkyo, Tokyo 113-8656, Japan

4. Department of Advanced Science and Engineering, Hiroshima University 4 , 1-4-1 Kagamiyama, Higashihiroshima, Hiroshima 739-8527, Japan

5. School of Physics, University College Dublin 5 , Belfield, Dublin 4, Ireland

Abstract

We demonstrated spectral control of beyond extreme ultraviolet (B-EUV) emission at a central wavelength of 6.76 nm from a gadolinium (Gd) laser-produced plasma. The highest spectral purity (SP) was 5.1% under dual 1-μm laser pulse irradiation. It doubled compared to a value of 2.4% attained under single laser pulse irradiation of solid density Gd because of the reduction in optical depth. The highest maximum SP was higher than that obtained using a mid-infrared laser at 10.6 μm. The SP for the 150-ps main laser was also higher than that for 6-ns main laser irradiation. Our approach can be extended to mid-infrared solid-state laser-produced plasmas (LPPs) using driving laser wavelengths ranging from 2 to 9 μm for efficient B-EUV source development.

Funder

Japan Society for the Promotion of Science

Sumitomo Foundation

Publisher

AIP Publishing

Link

https://pubs.aip.org/aip/apl/article-pdf/doi/10.1063/5.0180836/19333085/052107_1_5.0180836.pdf

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