Single-mask microfabrication of aspherical optics using KOH anisotropic etching of Si
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference2 articles.
1. Hybrid curvature and gradient wave-front sensor
2. Micromirror arrays using KOH:H2O micromachining of silicon for lens templates, geodesic lenses, and other applications
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3. Flexible refractive and diffractive micro-optical films shaped by fitting aspherical microprofiles with featured aperture and depth and their spatial arrangement for imaging applications;Journal of Vacuum Science & Technology B;2022-03
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