Arrayed silicon-based concave microlens fabricated by single mask ultraviolet-photolithography and dual-step KOH etching-Reference-Cited by-同舟云学术

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Arrayed silicon-based concave microlens fabricated by single mask ultraviolet-photolithography and dual-step KOH etching

Published:2022-04-07 Issue:02 Volume:2 Page:
ISSN:2708-5260
Container-title:Journal of Optical Microsystems
language:
Short-container-title:J. Optical Microsystems

Author:

Zhang Bo¹,Liu Taige¹,Wang Zhe¹,Huang Wenhai¹,Hu Chai¹,Liu Kewei¹,Chen Mingce¹,Shi Jiashuo¹,Zhang Xinyu¹

Affiliation:

1. Huazhong University of Science and Technology, National Key Laboratory of Science and Technology on

Publisher

SPIE-Intl Soc Optical Eng

Subject

General Engineering

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Silicon flow stop frame for encapsulation of CMOS microsensor chips by wet anisotropic etching in KOH;Engineering Research Express;2024-04-10

2. Development of Shape Prediction Model of Microlens Fabricated via Diffuser-Assisted Photolithography;Micromachines;2023-11-29

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