Micromirror arrays using KOH:H2O micromachining of silicon for lens templates, geodesic lenses, and other applications
Author:
Publisher
SPIE-Intl Soc Optical Eng
Subject
General Engineering,Atomic and Molecular Physics, and Optics
Cited by 31 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. THz beam shaping based on diffractive transformation for forming patterned simulation lightfields and wavefronts;Infrared Physics & Technology;2022-08
2. Arrayed silicon-based concave microlens fabricated by single mask ultraviolet-photolithography and dual-step KOH etching;Journal of Optical Microsystems;2022-04-07
3. Design and fabrication of 45° inclined mirrors for wafer-level optical absorption spectroscopy;Journal of Physics: Conference Series;2016-10
4. Miniature Schwarzschild objective as a micro-optical component free of main aberrations: concept, design, and first realization with silicon-glass micromachining;Applied Optics;2016-03-30
5. Arrays of millimeter-sized glass lenses for miniature inspection systems;SPIE Proceedings;2014-05-02
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