Miniature Schwarzschild objective as a micro-optical component free of main aberrations: concept, design, and first realization with silicon-glass micromachining

Author:

Baranski Maciej,Passilly Nicolas,Bargiel Sylwester,Froehly Luc,Gorecki Christophe

Funder

Joint Programme Inter Carnot Fraunhofer (PICF)

Agence Nationale de la Recherche (ANR)

French RENATECH network and its FEMTO-ST technological facility MIMENTO.

Publisher

The Optical Society

Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Modeling and analysis of sulfur hexafluoride plasma etching for silicon microcavity resonators;Journal of Micromechanics and Microengineering;2021-10-19

2. Locating optimal freeform surfaces for off-axis optical systems;Optics Communications;2020-07

3. 45.5X Infinity Corrected Schwarzschild Microscope Objective Lens Design;International Journal of Measurement Technologies and Instrumentation Engineering;2018-01

4. Concave silicon micromirrors for stable hemispherical optical microcavities;Optics Express;2017-06-23

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