General aspheric refractive micro-optics fabricated by optical lithography using a high energy beam sensitive glass gray-level mask-Reference-Cited by-同舟云学术

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General aspheric refractive micro-optics fabricated by optical lithography using a high energy beam sensitive glass gray-level mask

Published:1996-11 Issue:6 Volume:14 Page:3730
ISSN:0734-211X
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:
Short-container-title:J. Vac. Sci. Technol. B

Author:

Däschner Walter

Publisher

American Vacuum Society

Subject

General Engineering

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