Integrated grating circuit for guided-beam multiple division fabricated by electron-beam direct writing
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference12 articles.
1. Periodic structures for integrated optics
2. Ion Beam Micromachining of Integrated Optics Components
3. Gratings for integrated optics fabricated by electron microscope
4. Gratings for Integrated Optics by Electron Lithography
5. Direct writing of optical gratings using a scanning electron microscope
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