Gratings for integrated optics fabricated by electron microscope
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1654908
Reference2 articles.
1. GRATING COUPLER FOR EFFICIENT EXCITATION OF OPTICAL GUIDED WAVES IN THIN FILMS
2. Electron-Resist Fabrication of Bends and Couplers for Integrated Optical Circuits
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