Design and fabrication of a miniaturized gas ionization chamber for production of high quality ion beams-Reference-Cited by-同舟云学术

Design and fabrication of a miniaturized gas ionization chamber for production of high quality ion beams

Published:2012-09 Issue: Volume:97 Page:134-137
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Jun D.S.,Kutchoukov V.G.,Heerkens C.T.H.,Kruit P.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference13 articles.

1. High brightness inductively coupled plasma source for high current focused ion beam applications

2. Nanobeam production with the multicusp ion source

3. Beam emittance measurements of transformer coupled plasma ion source for focused ion beam

4. Performance of multicusp plasma ion source for focused ion beam applications

5. Production of noble gas ion beams in a focused ion beam machine using an electron beam ion trap

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2. Performance test of high brightness nano-aperture ion source;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2017-08

3. Development of ion sources: Towards high brightness for proton beam writing applications;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2015-04

4. Performance predictions for a laser-intensified thermal beam for use in high-resolution focused-ion-beam instruments;Physical Review A;2014-12-15