Beam emittance measurements of transformer coupled plasma ion source for focused ion beam
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1702124
Reference11 articles.
1. A review of focused ion beam applications in microsystem technology
2. Focused ion beam technology and applications
3. High‐field ion sources and applicationsa)
4. Performance of multicusp plasma ion source for focused ion beam applications
5. Energy spread of a focused ion beam system with a supertip
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2. Variable gaseous ion beams from plasmas driven by electromagnetic waves for nano-micro structuring: a tutorial and an overview of recent works and future prospects;Plasma Research Express;2020-08-03
3. Design and fabrication of a miniaturized gas ionization chamber for production of high quality ion beams;Microelectronic Engineering;2012-09
4. Emittance studies with an Allison scanner;Review of Scientific Instruments;2006-03
5. Volume production negative hydrogen ion sources;IEEE Transactions on Plasma Science;2005-12
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