Development of ion sources: Towards high brightness for proton beam writing applications-Reference-Cited by-同舟云学术

Development of ion sources: Towards high brightness for proton beam writing applications

Published:2015-04 Issue: Volume:348 Page:23-28
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Liu Nannan,Santhana Raman P.,Xu Xinxin,Tan Huei Ming,Khursheed Anjam,van Kan Jeroen A.

Funder

U.S. Air Force

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference21 articles.

3. Nucl. Instrum. Methods Phys. Res. B;Yao,2013

4. Japanese governments’ Nanotechnology Business Creation Initiative (NBCI) Roadmap 2010.

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