Formation of cerium oxide film via post-sputter oxidation of cerium in nitrogen/oxygen/nitrogen ambient-Reference-Cited by-同舟云学术

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Formation of cerium oxide film via post-sputter oxidation of cerium in nitrogen/oxygen/nitrogen ambient

Published:2021-01 Issue: Volume:851 Page:156786
ISSN:0925-8388
Container-title:Journal of Alloys and Compounds
language:en
Short-container-title:Journal of Alloys and Compounds

Author:

Mohd Zabidi Ainita Rozati,Lim Way Foong

Funder

Malaysia Ministry of Education

Fundamental Research Grant Scheme (FRGS

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Mechanical Engineering,Mechanics of Materials

Reference73 articles.

1. Effects of annealing time on the electrical properties of Y2O3 gate on silicon;Quah;J. Exp. Nanosci.,2015

2. Effects of post-deposition annealing time in oxygen ambient on Y2O3 film deposited on silicon substrate;Quah;Mater. Res. Innovat.,2014

3. Physical and electrical characteristics of metalorganic decomposed CeO2 gate spin-coated on 4H-SiC;Lim;Appl. Phys. A,2011

4. Study of molar ratio on the characteristics of metal-organic decomposed LaxCe1-xOz film as a metal reactive oxide on Si substrate;Lim;J. Alloys Compd.,2013

5. Chemical deposition of Al2O3 thin films on Si substrates;Vitanov;Thin Solid Films,2009

Cited by 14 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. The impact of post-deposition annealing durations on the formation of Tb4O7 passivation layer on silicon substrate;Ceramics International;2024-07

2. A review on potential use of cerium oxide and doped cerium oxide as high dielectric constant seed layers for overgrowth of cerium oxide nanostructures;Materials Research Express;2024-06-01

3. Investigation of concurrent flow of nitrogen and oxygen for the oxidation of cerium to cerium oxide films;Journal of Materials Science: Materials in Electronics;2024-02

4. Growth of polycrystalline gallium oxide films in nitrogen–oxygen–nitrogen, argon, and oxygen ambient;Journal of Materials Science: Materials in Electronics;2023-12

5. Metal-organic decomposed cerium oxide thin film in mixed ambient at different temperatures for MOS capacitor;Sustainable Materials and Technologies;2023-04

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