Effects of ammonia-ambient annealing on physical and electrical characteristics of rare earth CeO2 as passivation film on silicon
Author:
Funder
Universiti Sains Malaysia
RU Top-Down
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Mechanical Engineering,Mechanics of Materials
Reference67 articles.
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3. Physical and electrical characteristics of metal-organic decomposed CeO2 gate spin-coated on 4H-SiC;Lim;Appl. Phys. A,2011
4. Study of molar ratio on the characteristics of metal-organic decomposed LaxCe1-xOz film as a metal reactive oxide on Si substrate;Lim;J. Alloy. Compd.,2013
5. Effects of postdeposition annealing in argon ambient on metallorganic decomposed CeO2 gate spin coated on silicon;Quah;J. Electrochem. Soc.,2010
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