Various applications of resonant pressure sensor chip based on 3-D micromachining-Reference-Cited by-同舟云学术

Various applications of resonant pressure sensor chip based on 3-D micromachining

Published:1999-03 Issue:3 Volume:73 Page:261-266
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Harada Kinji,Ikeda Kyoichi,Kuwayama Hideki,Murayama Hidekazu

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference13 articles.

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2. C.W. Doran, The Proceedings of ISA Annual Conference (1984) pp. 457–462.

3. Etched silicon vibrating sensor

4. K. Harada, Resonant pressure sensor based on 3-D micromachining and its applications, Technical Digest of 15th Sensor Symposium (1997) pp. 19–24.

5. Resonant sensor;Harada;Journal of SICE,1989

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