Ultrasensitive Pressure Sensor Based on an Integrated Circular Piezoelectric MEMS Resonator and Diaphragm Structure
Author:
Affiliation:
1. Centre for Nano Science and Engineering, Indian Institute of Science, Bengaluru, India
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Instrumentation
Link
http://xplorestaging.ieee.org/ielx7/7782634/10312795/10288036.pdf?arnumber=10288036
Reference13 articles.
1. Passive remote sensing for temperature and pressure using SAW resonator devices
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3. A Quartz Resonant Ultra-High Pressure Sensor With High Precision and High Stability
4. Novel resonant pressure sensor based on piezoresistive detection and symmetrical in-plane mode vibration
5. A critical review of MEMS capacitive pressure sensors;balavalad;Sens Transducers,2015
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