Development of a new MEMS resonant differential pressure sensor with high accuracy and high stability-Reference-Cited by-同舟云学术

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Development of a new MEMS resonant differential pressure sensor with high accuracy and high stability

Published:2024-02 Issue: Volume:226 Page:114080
ISSN:0263-2241
Container-title:Measurement
language:en
Short-container-title:Measurement

Author:

Cheng Chao,Lu Yulan^ORCID,Yao Jiahui,Chen Jian,Chen Deyong,Wang Junbo

Funder

National Natural Science Foundation of China

Ministry of Science and Technology of the People's Republic of China

National Science Fund for Distinguished Young Scholars

NSAF Joint Fund

National Key Research and Development Program of China

National Safety Academic Fund

Publisher

Elsevier BV

Subject

Applied Mathematics,Electrical and Electronic Engineering,Condensed Matter Physics,Instrumentation

Reference34 articles.

1. Development of a high differential pressure piezoelectric active proportional regulation valve using a bending transducer;Li;IEEE. Trans. Ind. Electron.,2020

2. Differential pressure/pressure transmitters applied with semiconductor sensors;Matsuoka;IEEE. Trans. Ind. Electron.,1986

3. Stand-alone stretchable absolute pressure sensing system for industrial applications;Guo;IEEE. Trans. Ind. Electron.,2017

4. Diaphragm shape effect on the sensitivity of surface acoustic wave based pressure sensor for harsh environment;Wang;App. Phys. Lett.,2015

5. Annularly grooved diaphragm pressure sensor with embedded silicon nanowires for low pressure application;Zhang;J. Microelectromech. Syst.,2014

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