Author:
Kabir A.E,Bashir R,Bernstein J,De Santis J,Mathews R,O'Boyle J.O,Bracken C
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference8 articles.
1. For a good overview of silicon micro-machining and related applications, see the special issue of Proceedings of the IEEE, Vol. 86, No. 8, 1998.
2. ZnO on Si integrated acoustic sensor;Royer;Sensors and Actuators,1983
3. Micro-machined subminiature condenser microphones in silicon;Kuhnel;Sensors and Actuators A,1992
4. A subminiature condenser microphone with silicon nitride membrane and silicon back plate;Hohm;J. Acoust. Soc. Am.,1989
5. P.R. Scheeper, W. Olthuis, P. Bergveld, Fabrication of a subminiature silicon condenser microphone using the sacrificial layer technique, Proc. 6th Int. Conf. Solid-State Sensors and Actuators (Transducers '91), San Francisco, USA, June 24–28, 1991, 408–411.
Cited by
25 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献