ZnO on Si integrated acoustic sensor

Author:

Royer M.,Holmen J.O.,Wurm M.A.,Aadland O.S.,Glenn M.

Publisher

Elsevier BV

Subject

General Engineering

Reference7 articles.

1. Fabrication and characterization of the ZnO piezoelectric films for sensor devices;Shiosaki;IEEE Proc. CH.,1979

2. Silicon as a mechanical material;Petersen;IEEE Proc.,1980

3. Piezoelectric field-effect transistor strain trasducers;Conragan;Proc. IEEE Solid State Sensors Symp., Minneapolis, Minn., USA,1970

4. Thin Film ZnO-MOS transducer with virtually d.c. response;Chen;Proc. IEEE US Symp. Boston, Mass. USA,1980

5. Integrated ZnO/Si pressure sensor;Royer;U.S. Patent pending,1981

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