MEMS-based piezoresistive and capacitive microphones: A review on materials and methods

Author:

Kumar Ashish,Varghese ArathyORCID,Kalra Dheeraj,Raunak Anshuman,Jaiverdhan ,Prasad Mahanth,Janyani Vijay,Yadav R.P.

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference145 articles.

1. A piezoelectric micro-electromechanical microphone for implantable hearing aid applications;Zargarpour;Microsyst. Technol.,2015

2. A technical review and evaluation of implantable sensors for hearing devices;Calero;Biomed. Eng. Online,2018

3. Silicon Microphone for Hearing Aid Applications;Bay,1997

4. A new measurement microphone based on MEMS technology;Scheeper;J. Microelectromech. Syst.,2003

5. The Microphone Book: From Mono to Stereo To Surround-a Guide to Microphone Design and Application;Eargle,2012

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