Micromachined subminiature condenser microphones in silicon-Reference-Cited by-同舟云学术

Micromachined subminiature condenser microphones in silicon

Published:1992-04 Issue:1-3 Volume:32 Page:560-564
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Kühnel W.,Hess G.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference9 articles.

1. Acoustic sensors;Sessler;Sensors and Actuators A,1991

2. A silicon subminiature electret microphone;Sprenkels;Proefschrift,1988

3. Subminiature silicon integrated electret capacitor microphone;Murphy;IEEE Trans. Elect. Insul.,1989

4. A silicon electrostatic ultrasonic transducer;Suzuki;IEEE Trans. Ultrason. Ferroelectr. Freq. Control,1989

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