Acoustic sensors-Reference-Cited by-同舟云学术

Acoustic sensors

Published:1991-03 Issue:1-3 Volume:26 Page:323-330
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Sessler G.M.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference36 articles.

1. Silicon as a mechanical material;Petersen;IEEE Proc.,1982

2. ZnO on Si integrated acoustic sensor;Royer;Sensors and Actuators,1983

3. An integrated silicon-electret condenser microphone;Hohm;Proc. 11th Int. Congr. Acoustics, Paris, France,1983

4. D. Hohm, Subminiatur-Silizium-Kondensatormi-krofon, Fortschritte der Akustik, DAGA '85, pp. 847–850.

5. Silicon micromechanics: new technology for sensors;Poteat;Proc. 12th Int. Congr. Acoustics, Toronto, Canada,1986

Cited by 52 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Leveraging Ferroelectret Nanogenerators for Acoustic Applications;Micromachines;2023-11-23

2. Stress analysis of circular membrane-type MEMS microphones with piezoelectric read-out;Sensors and Actuators A: Physical;2023-01

3. Challenges, Applications, and Future of Wireless Sensors in Internet of Things: A Review;IEEE Sensors Journal;2022-03-15

4. Calculation of Vibrations of Silicon Membranes for an Acoustic Receiver;Bulletin of the Lebedev Physics Institute;2022-03

5. Design Approaches of MEMS Microphones for Enhanced Performance;Journal of Sensors;2019-03-06