Fabrication of a subminiature silicon condenser microphone using the sacrificial layer technique-Reference-Cited by-同舟云学术

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Fabrication of a subminiature silicon condenser microphone using the sacrificial layer technique

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Container-title:TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers
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Author:

Scheeper P.R.,Olthuis W.,Bergveld P.

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx2/505/3940/00148898.pdf?arnumber=148898

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