Design and characterization of high sensitive MEMS capacitive microphone with fungous coupled diaphragm structure-Reference-Cited by-同舟云学术

Design and characterization of high sensitive MEMS capacitive microphone with fungous coupled diaphragm structure

Published:2015-01-31 Issue:2 Volume:22 Page:401-411
ISSN:0946-7076
Container-title:Microsystem Technologies
language:en
Short-container-title:Microsyst Technol

Author:

Gharaei Hassan,Koohsorkhi Javad

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/s00542-014-2406-2.pdf

Reference34 articles.

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2. Blackstock DT (2000) Fundamentals of physical acoustics. Wiley, Hoboken

3. Fox RW, McDonald AT, Pritchard PJ (2004) Introduction to fluid mechanics, 6th edn. Wiley, New York (ch. 8)

4. Fraim F, Murphy P (1970) Miniature electret microphones. I. Audio Eng Sot I8:511–517

5. Ganji BA, Majlis BY (2009) Design and fabrication of a novel single-chip mems capacitive microphone using slotted diaphragm. J Micro/Nanolithogr MEMS MOEMS 8(2):313–328

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