Sensitivity Analysis of Novel PolyMUMPs-Based Ultrasonic MEMS Microphones
Author:
Affiliation:
1. École de Technologie Supérieure,Department of Electrical Engineering,Montreal,Canada
2. MEMS Vision International Inc.,Montreal,Canada
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10306337/10306342/10307089.pdf?arnumber=10307089
Reference16 articles.
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3. Static and dynamic characterization of micro-electro-mechanical system repulsive force actuators
4. Size-dependent dynamics of a FG Nanobeam near nonlinear resonances induced by heat
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