1. S.A. Campbell, H.J. Lewerenz (Eds.): Semiconductor Micromachining, Vol. 1, Fundamental Electrochemistry and Physics (Wiley, Chichester, 1998)
2. S.A. Campbell, H.J. Lewerenz (Eds.): Semiconductor Micromachining, Vol. 2, Techniques and Industrial Applications (Wiley, Chichester, 1998)
3. A.R. Clawson: Guide to references on III–V semiconductor etching, Mater. Sci. Eng. 31, 1–438 (2001)
4. M. Elwenspoek, H.V. Jansen: Silicon Micromachining, Chapters 2, 7 (Cambridge University Press, Cambridge, 1998)
5. M. Gad-el-Hak (Ed.): MEMS: Design and Fabrication, Chapter 3 (CRC Press, Boca Raton, FL, 2006)