39-4: TFT Integrated Microelectromechanical Shutter for Display Application
Author:
Affiliation:
1. Institute for Large Area Microelectronics and Research Centre SCoPE; University of Stuttgart; Stuttgart BW Germany
Publisher
Wiley
Reference9 articles.
1. 5.1: Invited Paper: A 5.7″ Color Mirasol® XGA Display For High Performance Applications;Gally;SID Symposium Digest of Technical Papers,2011
2. Pixtronix digital micro-shutter display technology: a MEMS display for low power mobile multimedia displays;Brosnihan;Proc. SPIE 7594, MOEMS and Miniaturized Systems IX,2010
3. Time multiplexed optical shutter;Van Ostrand;SID Symp Dig,2008
4. 54-1: Parallel Fabrication for Integration of Electronic and Microelectromechanical Systems;Schalberger;SID Symposium Digest of Technical Papers,2016
5. Emerging Digital Micromirror Device (DMD) Applications;Dudley;SPIE Proceedings,2003
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1. High‐performance MEMS shutter display with metal‐oxide thin‐film transistors and optimized MEMS element;Journal of the Society for Information Display;2023-08-14
2. 50.2: Invited Paper: Characterization of Co‐Fabricated Silicon TFT and MEMS Shutter Display;SID Symposium Digest of Technical Papers;2021-02
3. MOEMS micromirror arrays in smart windows for daylight steering;Journal of Optical Microsystems;2021-01-26
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