Graphene Membranes for Hall Sensors and Microphones Integrated with CMOS-Compatible Processes-Reference-Cited by-同舟云学术

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Graphene Membranes for Hall Sensors and Microphones Integrated with CMOS-Compatible Processes

Published:2019-07-18 Issue:8 Volume:2 Page:5079-5085
ISSN:2574-0970
Container-title:ACS Applied Nano Materials
language:en
Short-container-title:ACS Appl. Nano Mater.

Author:

Wittmann Sebastian¹²^ORCID,Glacer Christoph³,Wagner Stefan⁴,Pindl Stephan¹,Lemme Max C.²⁴^ORCID

Affiliation:

1. Infineon Technologies AG, Wernerwerkstrasse 2, 93049 Regensburg, Germany

2. Chair of Electronic Devices, RWTH Aachen University, Otto-Blumenthal-Straße 2, 52074 Aachen, Germany

3. Infineon Technologies AG, Am Campeon 1-15, 85579 Neubiberg, Germany

4. AMO GmbH, Otto-Blumenthal-Straße 25, 52074 Aachen, Germany

Funder

Bundesministerium f?r Bildung und Forschung

H2020 Future and Emerging Technologies

Publisher

American Chemical Society (ACS)

Subject

General Materials Science

Link

http://pubs.acs.org/doi/pdf/10.1021/acsanm.9b00998

Reference68 articles.

1. Electromechanical Resonators from Graphene Sheets

2. Nonlinear damping in mechanical resonators made from carbon nanotubes and graphene

3. Electromechanical Piezoresistive Sensing in Suspended Graphene Membranes

4. Two-dimensional materials for electronic applications

5. 200 GHz Maximum Oscillation Frequency in CVD Graphene Radio Frequency Transistors

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