Author:
Kalkowski G.,Risse S.,Guyenot V.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference4 articles.
1. Electrostatic chucks for lithography applications;Kalkowski;Microelectron. Eng.,2001
2. In cooperation with U. Kirschstein, Leica Microsystems Lithography GmbH, Germany.
3. A physical phenomenon and its application to telegraphy, telephony etc;Johnsen;J. Inst. Electron. Eng.,1923
4. Electrostatic force and absorption current of alumina electrostatic chuck;Watanabe;Jpn. J. Appl. Phys.,1992
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