Author:
Kalkowski G.,Risse S.,Harnisch G.,Guyenot V.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference6 articles.
1. Manufacturing issues of electrostatic chucks;Wright;J. Vac. Sci. Technol.,1995
2. Electrostatic clamping applied to semiconductor plasma processing;Daviet;J. Electrochem. Soc.,1993
3. A physical phenomenon and its application to telegraphy, telephony, etc.;Johnsen;J. Inst. Electr. Eng.,1923
4. Electrostatic force and absorption current of alumina electrostatic chuck;Watanabe;Jpn. J. Appl. Phys.,1992
5. Leica Microsystems Lithography GmbH, patent pending.
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