Electrostatic Force and Absorption Current of Alumina Electrostatic Chuck
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by 32 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
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3. Enhanced High-Temperature Electrical Resistivity of Aluminum Nitride Obtained by Engineering a Schottky Barrier at Grain Boundaries;Journal of the Korean Physical Society;2020-10
4. Prediction of residual clamping force for Coulomb type and Johnsen–Rahbek type of bipolar electrostatic chucks;Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science;2018-02-12
5. MgO doping and annealing effect on high temperature electrical resistivity of AlN-Y2O3 ceramics;J KOR CRYST GROWTH C;2018
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